Advanced Energy Industries Inc. (Nasdaq: AEIS) has launched the 401M mid-infrared optical pyrometer, a high-speed, non-contact temperature measurement device designed to enhance precision in semiconductor and industrial process control. The new model was unveiled at SEMICON® West 2025 in Phoenix, Arizona.
Engineered for both speed and accuracy, the 401M offers response times as fast as one microsecond and an accuracy within ±3°C across temperatures ranging from 50°C to 1,300°C. Its mid-infrared technology enables temperature measurement through transparent materials and outside of process chambers, making it suitable for applications such as lamp-heated epitaxy, chemical vapor deposition (CVD), and thin-film glass coating — areas where traditional near-infrared pyrometers fall short.
“The 401M sets a new benchmark in speed, accuracy, and repeatability,” said Dhaval Dhayatkar, vice president of Critical Sensing and Control, System Power at Advanced Energy. “By providing reliable, interference-free monitoring of chamber conditions, it supports process innovation and operational efficiency across semiconductor and industrial environments.”
Equipped with integrated EtherCAT® communication, the pyrometer simplifies equipment integration by removing the need for external modules, reducing both complexity and potential points of failure. It also offers customizable configurations — including wavelength, temperature range, working distance, and spot size — to adapt to diverse process conditions and materials.
The 401M is backward compatible with Advanced Energy’s existing OR400M platform, enabling a cost-effective upgrade path for existing customers.
The product aligns with Advanced Energy’s broader mission to support “Advancing the Angstrom Era”.
