Advanced Energy Industries, Inc. (Nasdaq: AEIS), a global provider of precision power conversion, measurement and control solutions, has launched the Thyro-XD, a silicon-controlled rectifier (SCR) power controller designed to improve the stability and efficiency of temperature-sensitive processes in semiconductor manufacturing and other industrial applications.
The new controller is built to support applications requiring high-speed and accurate thermal regulation, particularly those using lamp-based heating systems. These are critical in semiconductor wafer processing, where temperature stability impacts product yield and operational consistency.
According to the company, the Thyro-XD offers a power density of 188 W/in³, doubling the control capacity compared to comparable products. It incorporates real-time load resistance measurement, enabling faster response to temperature changes and tighter process control. The unit operates without fans, using convection cooling to simplify system integration and improve reliability.
“Demand for smaller, more efficient chips is driving the need for improved temperature control in semiconductor tools,” said Dhaval Dhayatkar, Vice President, Critical Sensing and Control Products at Advanced Energy. “The Thyro-XD delivers speed and precision that enhances both process stability and repeatability.”
The controller includes optional EtherCAT connectivity via the company’s Advanced Bus Module (ABM), and it can integrate with Advanced Energy’s Impac pyrometers for real-time feedback, supporting automated thermal management systems.
Advanced Energy stated that the device also delivers improved output accuracy across voltage, current, and power parameters, helping manufacturers mitigate input fluctuations and extend component life while reducing maintenance requirements.